Showing 1–5 of 5 inventors
| Rank | Inventor | Primary Company | Patents |
|---|---|---|---|
| 1 | Jurgen Beuthan | Carl Zeiss Stiftung | 5 |
| 1 | Holger Rücker | Ihp Gmbh—Innovations For High Performance Microelectronics / Leibniz-Institut Für Innovative Mikroelektronik | 5 |
| 3 | Christian Zur | Carl Zeiss Stiftung | 1 |
| 3 | Tim Landgraf | Freie Universität Berlin | 1 |
| 3 | Toni Haberschuss | — | 1 |