Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8119208 | Apparatus and method for focused electric field enhanced plasma-based ion implantation | Paul K. Chu | 2012-02-21 |
| 7741621 | Apparatus and method for focused electric field enhanced plasma-based ion implantation | Paul K. Chu | 2010-06-22 |
| 6740843 | Method and apparatus for automatically re-igniting vacuum arc plasma source | Paul K. Chu | 2004-05-25 |