Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5168197 | Ion beam generating apparatus, film-forming apparatus, and method for formation of film | Katushige Yamada, Kazuhiko Kawamura | 1992-12-01 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5168197 | Ion beam generating apparatus, film-forming apparatus, and method for formation of film | Katushige Yamada, Kazuhiko Kawamura | 1992-12-01 |