SP

Shih-Yao Pan

CA Chroma Ate: 5 patents #10 of 219Top 5%
Overall (All Time): #912,179 of 4,157,543Top 25%
5
Patents All Time

Issued Patents All Time

Showing 1–5 of 5 patents

Patent #TitleCo-InventorsDate
12327767 Optical inspection apparatus in semiconductor process system Hung-Tien Kao 2025-06-10
11841218 System and method of measuring surface topography Chih-Yao Ting, Chia-Hung Lin, Hsin-Yun Chang 2023-12-12
11269170 Separate microscopy system and adjusting method thereof Yu Wang, Tsung-Hsien Ou, Kuo-Wei Huang 2022-03-08
10436580 Surface measurement system Yi-Chang Chiu, Cheng-Ting Tsai, Lan Yang, Hsiu-Wei KUO, Shao-En Chung 2019-10-08
8638445 Imaging apparatus and method thereof Yu-Hsuan Lin, Hsin-Yueh Sung, Alvin Chang, Hung-Ta Chien 2014-01-28