Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8760626 | Focus detection apparatus for projection lithography system | Jinlong Li, Song Hu, Lixin Zhao, Feng Xu, Lanlan Li | 2014-06-24 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8760626 | Focus detection apparatus for projection lithography system | Jinlong Li, Song Hu, Lixin Zhao, Feng Xu, Lanlan Li | 2014-06-24 |