Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10734189 | Ion implantation amount adjustment device and method, ion implantation apparatus and determination method | Hao Jing, Dongwoo Kang, Yongyi Fu, Chenliang Liu, Kang Luo | 2020-08-04 |
| 10598220 | Bearing device and ion implantation device | Chenliang Liu, Donghua JIANG, Yongyi Fu, Chao Tan, Xuewei Wang +5 more | 2020-03-24 |
| 10312655 | Excimer laser generator and excimer laser annealing equipment | Yin Xie, Zubin Lv, Yu ZHANG, Yongzhou Ling, Yayu Wang +3 more | 2019-06-04 |