Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9140986 | Resist underlayer composition and process of producing integrated circuit devices using the same | Mi Young Kim, Sang Kyun Kim, Hyeon-Mo Cho, Sang-Ran Koh, Hui-Chan Yun +1 more | 2015-09-22 |
| 8524851 | Silicon-based hardmask composition and process of producing semiconductor integrated circuit device using the same | Sang Kyun Kim, Hyeon-Mo Cho, Sang-Ran Koh, Mi Young Kim, Hui-Chan Yun +1 more | 2013-09-03 |
| 8357576 | Method of manufacturing semiconductor device | Chong-Kwang Chang, Sung-Hon Chi, Hong-Jae Shin, Young Mook Oh, Ju-Beom Yi | 2013-01-22 |