Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8920097 | Wafer handling system for a loadlock | — | 2014-12-30 |
| 6460404 | Apparatus and method for detecting bad edge bead removal in a spin-on-glass coater tool | Bak Hong Chia, Chun Pheng Tan | 2002-10-08 |