Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5930677 | Method for reducing microloading in an etchback of spin-on-glass or polymer | Jia Zhen Zheng, Yi Xu | 1999-07-27 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5930677 | Method for reducing microloading in an etchback of spin-on-glass or polymer | Jia Zhen Zheng, Yi Xu | 1999-07-27 |