Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5705428 | Method for preventing titanium lifting during and after metal etching | Lianjun Liu | 1998-01-06 |
| 5533635 | Method of wafer cleaning after metal etch | — | 1996-07-09 |
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5705428 | Method for preventing titanium lifting during and after metal etching | Lianjun Liu | 1998-01-06 |
| 5533635 | Method of wafer cleaning after metal etch | — | 1996-07-09 |