Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9411341 | Vacuum pump controller | Ming Liang Zhu, Chuin Boon Yeap | 2016-08-09 |
| 6162336 | Clamping ring design to reduce wafer sticking problem in metal deposition | — | 2000-12-19 |