Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11988970 | Method for detecting defect in semiconductor fabrication process | — | 2024-05-21 |
| 8193648 | Method for detecting errors of exposed positions of a pre-layer and a current layer by an integrated alignment and overlay mark | Chung-Yuan Lee | 2012-06-05 |
| 7136520 | Method of checking alignment accuracy of patterns on stacked semiconductor layers | — | 2006-11-14 |