| 12264749 |
Flow control equipment and automatic refilling system |
Bo Liu |
2025-04-01 |
| 12203312 |
System, method, and device for monitoring closed state of cover of exposure machine, medium, and equipment |
— |
2025-01-21 |
| 12191177 |
Storage system, query system and storage method for reticles, and computer device |
— |
2025-01-07 |
| 12117738 |
Reticle detection apparatus, reticle detection method, exposure machine and photolithography device |
— |
2024-10-15 |
| 12099309 |
Wafer processing apparatus and wafer transfer method |
— |
2024-09-24 |
| 12070780 |
Machine cleaning device |
— |
2024-08-27 |
| 12072640 |
Cleaning system, exposure machine, and cleaning method |
Lulu Fang |
2024-08-27 |
| 11972967 |
Wafer processing system, semiconductor-machine automatic leveling apparatus and leveling method thereof |
— |
2024-04-30 |
| 11923226 |
Conveyor device and semiconductor production equipment |
— |
2024-03-05 |
| 11922262 |
Photomask inspection system and method |
— |
2024-03-05 |
| 11822261 |
Wafer edge exposure apparatus, wafer edge exposure method and photolithography device |
— |
2023-11-21 |
| 11669015 |
Photolithography device and method for monitoring position of a light source in a photolithography device |
— |
2023-06-06 |