Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5466296 | Thin film deposition apparatus, mainly dedicated to PECVD and sputtering techniques and respective processes | Carlo Misiano, Enrico Simonetti | 1995-11-14 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5466296 | Thin film deposition apparatus, mainly dedicated to PECVD and sputtering techniques and respective processes | Carlo Misiano, Enrico Simonetti | 1995-11-14 |