Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9865485 | Apparatus and method for determining the location of plate elements of a wafer boat | Daniel Knopfle, Andreas Hartmann | 2018-01-09 |
| 7746482 | Determining the position of a semiconductor substrate on a rotation device | Michael Grandy | 2010-06-29 |
| 7493231 | Process for determining the actual position of a rotation axis of a transportation mechanism | — | 2009-02-17 |
| 7004716 | Device and method for aligning disk-shaped substrates | Paul Mantz | 2006-02-28 |