Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 4457901 | Method of refining silicon tetrafluoride gas | Naomichi Kitsugi, Teruo Fujinaga | 1984-07-03 |
| 4382071 | Process of preparing silicon tetrafluoride by using hydrogen fluoride gas | Naomichi Kitsugi, Teruo Fujinaga | 1983-05-03 |