Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9488914 | Fluorine-containing sulfonic acid salt, fluorine-containing sulfonic acid salt resin, resist composition, and pattern forming method using same | Kazunori Mori, Satoru Narizuka, Yuji Hagiwara, Masaki Fujiwara | 2016-11-08 |
| 9152045 | Fluorine-containing sulfonate, fluorine-containing sulfonate resin, resist composition and pattern formation method | Kazunori Mori, Satoru Narizuka, Masaki Fujiwara | 2015-10-06 |
| 8791293 | Fluorine-containing sulfonate, fluorine-containing sulfonate resin, resist composition and pattern formation method | Kazunori Mori, Satoru Narizuka, Masaki Fujiwara | 2014-07-29 |