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2020-02-04 |
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2017-08-29 |
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2017-07-18 |
| 8751180 |
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2014-06-10 |
| 8068999 |
Multi-gas flow device |
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2011-11-29 |
| 8010303 |
Multi-gas flow device |
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2011-08-30 |
| 7874208 |
System for and method of providing a wide-range flow controller |
Eric J. Redemann, Thomas Owen Maginnis |
2011-01-25 |
| 7720617 |
Flow sensor signal conversion |
William S. Valentine, John Lull |
2010-05-18 |
| 7636640 |
Multi-gas flow device |
John Lull, William S. Valentine |
2009-12-22 |
| 7434477 |
Methods and apparatus for pressure compensation in a mass flow controller |
John Lull, Joseph A. Saggio, Jr. |
2008-10-14 |
| 7409871 |
Mass flow meter or controller with inclination sensor |
Eric J. Redemann |
2008-08-12 |
| 7380564 |
System and method for a mass flow controller |
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2008-06-03 |
| 7273063 |
Methods and apparatus for pressure compensation in a mass flow controller |
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2007-09-25 |
| 7272512 |
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William S. Valentine, John Lull |
2007-09-18 |
| 7231931 |
System and method for a mass flow controller |
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2007-06-19 |
| 7114511 |
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2006-10-03 |
| 7073392 |
Methods and apparatus for pressure compensation in a mass flow controller |
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2006-07-11 |
| 7043374 |
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William S. Valentine, John Lull |
2006-05-09 |
| 6962164 |
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2005-11-08 |
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— |
2004-12-07 |
| 6425281 |
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2002-07-30 |