Issued Patents All Time
Showing 1–16 of 16 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8465587 | Modern hydride vapor-phase epitaxy system and methods | David J. Miller | 2013-06-18 |
| 6768135 | Dual process semiconductor heterostructures | David J. Miller, Tetsuzo Ueda | 2004-07-27 |
| 6676751 | Epitaxial film produced by sequential hydride vapor phase epitaxy | David J. Miller, Tetsuzo Ueda | 2004-01-13 |
| 6673149 | Production of low defect, crack-free epitaxial films on a thermally and/or lattice mismatched substrate | David J. Miller, Tetsuzo Ueda | 2004-01-06 |
| 6569765 | Hybrid deposition system and methods | David J. Miller | 2003-05-27 |
| 6566256 | Dual process semiconductor heterostructures and methods | David J. Miller, Tetsuzo Ueda | 2003-05-20 |
| 6498113 | Free standing substrates by laser-induced decoherency and regrowth | David J. Miller | 2002-12-24 |
| 6355107 | Compound gas injection system | David J. Miller, Tetsuzo Ueda | 2002-03-12 |
| 6290774 | Sequential hydride vapor phase epitaxy | David J. Miller, Tetsuzo Ueda | 2001-09-18 |
| 6190629 | Organic acid scrubber and methods | David J. Miller, Tetsuzo Ueda | 2001-02-20 |
| 6179913 | Compound gas injection system and methods | David J. Miller, Tetsuzo Ueda | 2001-01-30 |
| 6176925 | Detached and inverted epitaxial regrowth & methods | David J. Miller, Tetsuzo Ueda | 2001-01-23 |
| 6159287 | Truncated susceptor for vapor-phase deposition | David J. Miller, Tetsuzo Ueda | 2000-12-12 |
| 6146457 | Thermal mismatch compensation to produce free standing substrates by epitaxial deposition | — | 2000-11-14 |
| 6117213 | Particle trap apparatus and methods | Tetsuzo Ueda, David J. Miller | 2000-09-12 |
| 5919305 | Elimination of thermal mismatch defects in epitaxially deposited films through the separation of the substrate from the film at the growth temperature | — | 1999-07-06 |