| 8465587 |
Modern hydride vapor-phase epitaxy system and methods |
David J. Miller |
2013-06-18 |
| 6768135 |
Dual process semiconductor heterostructures |
David J. Miller, Tetsuzo Ueda |
2004-07-27 |
| 6676751 |
Epitaxial film produced by sequential hydride vapor phase epitaxy |
David J. Miller, Tetsuzo Ueda |
2004-01-13 |
| 6673149 |
Production of low defect, crack-free epitaxial films on a thermally and/or lattice mismatched substrate |
David J. Miller, Tetsuzo Ueda |
2004-01-06 |
| 6569765 |
Hybrid deposition system and methods |
David J. Miller |
2003-05-27 |
| 6566256 |
Dual process semiconductor heterostructures and methods |
David J. Miller, Tetsuzo Ueda |
2003-05-20 |
| 6498113 |
Free standing substrates by laser-induced decoherency and regrowth |
David J. Miller |
2002-12-24 |
| 6355107 |
Compound gas injection system |
David J. Miller, Tetsuzo Ueda |
2002-03-12 |
| 6290774 |
Sequential hydride vapor phase epitaxy |
David J. Miller, Tetsuzo Ueda |
2001-09-18 |
| 6190629 |
Organic acid scrubber and methods |
David J. Miller, Tetsuzo Ueda |
2001-02-20 |
| 6179913 |
Compound gas injection system and methods |
David J. Miller, Tetsuzo Ueda |
2001-01-30 |
| 6176925 |
Detached and inverted epitaxial regrowth & methods |
David J. Miller, Tetsuzo Ueda |
2001-01-23 |
| 6159287 |
Truncated susceptor for vapor-phase deposition |
David J. Miller, Tetsuzo Ueda |
2000-12-12 |
| 6146457 |
Thermal mismatch compensation to produce free standing substrates by epitaxial deposition |
— |
2000-11-14 |
| 6117213 |
Particle trap apparatus and methods |
Tetsuzo Ueda, David J. Miller |
2000-09-12 |
| 5919305 |
Elimination of thermal mismatch defects in epitaxially deposited films through the separation of the substrate from the film at the growth temperature |
— |
1999-07-06 |
