Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7163892 | Process for producing integrated circuit, and substrate with integrated circuit | Toshiharu Hirai, Tsuguo Koyanagi, Masayuki Matsuda, Michio Komatsu | 2007-01-16 |
| 6562465 | Coating liquid for forming a silica-containing film with a low-dielectric constant and substrate coated with such a film | Akira Nakashima, Michio Komatsu | 2003-05-13 |
| 6340641 | Substrate flattening method and film-coated substrate made thereby | Ryo Muraguchi, Akira Nakashima, Michio Kimatsu, Katsuyuki Machida, Hakaru Kyuragi +1 more | 2002-01-22 |
| 6086699 | Thin film-forming method and thin film-forming apparatus therefor | Akira Nakashima, Ryo Muraguchi, Michio Komatsu, Katsuyuki Machida, Hakaru Kyuragi +1 more | 2000-07-11 |