Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11927888 | Method for the tracking and identification of components of lithography systems, and lithography system | Claudia Woersching | 2024-03-12 |
| 11480883 | Method for operating a machine for microlithography | Dietmar Schnier | 2022-10-25 |
| 11188000 | Method and device for characterizing a mask for microlithography | Markus Koch, Tobias Mueller | 2021-11-30 |