Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6948821 | Mirror for reflecting electromagnetic radiation as well as illumination and imaging method employing the same | — | 2005-09-27 |
| 6885491 | Diffraction-optical component, illumination system and exposure system comprising such a diffraction-optical component as well as an exposure method employing such an exposure system | Martin Ross-Messemer, Frank Holler, Kurt Franke, Günter Martin, Hagen Schmidt +1 more | 2005-04-26 |
| 6597763 | Spectrometer arrangement | Frank Holler, Martin Ross-Messemer | 2003-07-22 |