Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8969835 | Particle beam system including a supply of process gas to a processing location | Ulrike Zeile | 2015-03-03 |
| 8704195 | Method for setting a position of a carrier element in a particle beam device | — | 2014-04-22 |