Issued Patents All Time
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11376822 | Corrosion-resistant components and methods of making | Matthew Simpson, Alan Filer | 2022-07-05 |
| 6744618 | Electrostatic chucks with flat film electrode | Morteza Zandi | 2004-06-01 |
| 6723274 | High-purity low-resistivity electrostatic chucks | — | 2004-04-20 |
| 6606234 | Electrostatic chuck and method for forming an electrostatic chuck having porous regions for fluid flow | — | 2003-08-12 |
| 6603650 | Electrostatic chuck susceptor and method for fabrication | Morteza Zandi | 2003-08-05 |
| 5834387 | Ceramic comprising silicon carbide with controlled porosity | Sai-Kwing Lau | 1998-11-10 |
| 5635430 | Intermediate for producing porous silicon carbide | Sai-Kwing Lau, Stephen Chwastiak | 1997-06-03 |
| 5589428 | Silicon carbide with controlled porosity | Sai-Kwing Lau | 1996-12-31 |
| 5395807 | Process for making silicon carbide with controlled porosity | Sai-Kwing Lau | 1995-03-07 |