Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9665015 | Original holding apparatus, exposure apparatus, method of manufacturing article and original holding method | — | 2017-05-30 |
| 9256141 | Exposure apparatus, device manufacturing method using same, and gas supply device | Naoki Yamaguchi | 2016-02-09 |
| 8131404 | Temperature regulating apparatus, exposure system, and device manufacturing method | Yoshiyuki Okada, Tomohiko Yoshida, Takafumi Ota | 2012-03-06 |