Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8072579 | Measuring method, adjustment method for stage movement characteristics, exposure method, and device manufacturing method | — | 2011-12-06 |
YT
Yusuke Tokuyama
Overall (All Time): #3,272,317 of 4,157,543Top 80%
1
Patents All Time