Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11347153 | Error detection and correction in lithography processing | Yusuke Miura | 2022-05-31 |
| 10514599 | Imprint apparatus and method of manufacturing article | Sentaro Aihara | 2019-12-24 |