Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10319623 | Conveyance hand, conveyance apparatus, lithography apparatus, manufacturing method of article, and holding mechanism | — | 2019-06-11 |
| 10222712 | Conveyance apparatus, lithography apparatus, and method of manufacturing article | — | 2019-03-05 |
| 9829802 | Conveying hand and lithography apparatus | — | 2017-11-28 |