Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8137519 | Sputtering cathode, sputtering apparatus provided with sputtering cathode, film-forming method, and method for manufacturing electronic device | Katsunori Itagaki, Tomoo Uchiyama, Hiroaki Saito, Toshinobu Chiba | 2012-03-20 |