Issued Patents All Time
Showing 51–57 of 57 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5413664 | Apparatus for preparing a semiconductor device, photo treatment apparatus, pattern forming apparatus and fabrication apparatus | Takayuki Yagi, Toshiyuki Komatsu, Shinichi Kawate | 1995-05-09 |
| 5409802 | Method and apparatus for fine processing | Toshiyuki Komatsu, Shinichi Kawate | 1995-04-25 |
| 5344522 | Pattern forming process and process for preparing semiconductor device utilizing said pattern forming process | Takayuki Yagi, Toshiyuki Komatsu, Shinichi Kawate | 1994-09-06 |
| 5242561 | Plasma processing method and plasma processing apparatus | — | 1993-09-07 |
| 5034086 | Plasma processing apparatus for etching, ashing and film-formation | — | 1991-07-23 |
| 5024716 | Plasma processing apparatus for etching, ashing and film-formation | — | 1991-06-18 |
| 4761199 | Shutter device for ion beam etching apparatus and such etching apparatus using same | — | 1988-08-02 |