Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12169368 | Positioning apparatus, lithography apparatus and article manufacturing method | — | 2024-12-17 |
| 12140876 | Processing apparatus and article manufacturing method | — | 2024-11-12 |
| 11829079 | Positioning apparatus, lithography apparatus and article manufacturing method | — | 2023-11-28 |
| 11681216 | Imprint apparatus, imprint method, article manufacturing method, molding apparatus, and molding method | — | 2023-06-20 |
| 10751930 | Imprint apparatus, imprint method, and method of manufacturing article | — | 2020-08-25 |
| 10372034 | Imprint apparatus, imprint method, and method for manufacturing article | Kazuki Nakagawa, Kazuhiro Sato | 2019-08-06 |
| 5946332 | Laser having a connection detector for monitoring a connection between separated oscillator and power units | — | 1999-08-31 |