Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6639333 | Linear motor stage system for use in exposure apparatus | Shigeto Kamata | 2003-10-28 |
| 6084319 | Linear motor, and stage device and exposure apparatus provided with the same | Shigeto Kamata | 2000-07-04 |
| 5821625 | Structure of chip on chip mounting preventing from crosstalk noise | Takayuki Yoshida, Takashi Otsuka, Hiroaki Fujimoto, Tadaaki Mimura, Ichiro Yamane +2 more | 1998-10-13 |
| 5805865 | Semiconductor device | Tadaaki Mimura, Takayuki Yoshida, Ichiro Yamane, Takio Yamashita, Yoshiaki Kasuga +1 more | 1998-09-08 |
| 5767009 | Structure of chip on chip mounting preventing from crosstalk noise | Takayuki Yoshida, Takashi Otsuka, Hiroaki Fujimoto, Tadaaki Mimura, Ichiro Yamane +2 more | 1998-06-16 |
| 4853756 | Projection exposure apparatus | — | 1989-08-01 |
| 4589769 | Exposure apparatus | — | 1986-05-20 |