Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7582185 | Plasma-processing apparatus | Yukito Aota, Masahiro Kanai, Atsushi Koike | 2009-09-01 |
| 6881684 | Method of forming silicon nitride deposited film | Yukito Aota, Masahiro Kanai, Atsushi Koike | 2005-04-19 |