Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12142450 | Photoelectric-surface electron source | Hiroyuki Taketomi, Motohiro Suyama, Wataru Matsudaira, Akihiro Kageyama, Kota Iwasaki +1 more | 2024-11-12 |
| 7834978 | Exposure apparatus, exposure method, and device manufacturing method | — | 2010-11-16 |
| 6539326 | Position detecting system for projection exposure apparatus | — | 2003-03-25 |