Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7140321 | Plasma processing apparatus and method | Hirohisa Oda, Hitoshi Ishihama, Kazumichi Kuramochi, Junya Takahashi | 2006-11-28 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7140321 | Plasma processing apparatus and method | Hirohisa Oda, Hitoshi Ishihama, Kazumichi Kuramochi, Junya Takahashi | 2006-11-28 |