Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11243462 | Lithography apparatus, method of forming pattern, and method of manufacturing article | Hiroaki Itabashi, Ryo Nakamichi, Tomonori Tsukahara | 2022-02-08 |
| 7466414 | Position detection apparatus and method | Hiroshi Tanaka | 2008-12-16 |
| 6992766 | Position detection apparatus and method | Hiroshi Tanaka | 2006-01-31 |