Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8098363 | Exposure apparatus and method of manufacturing a device | — | 2012-01-17 |
| 7668343 | Surface position measuring method and apparatus | Yuji Kosugi | 2010-02-23 |
| 7663732 | Exposure apparatus, exposure method and device manufacturing method for compensating position measuring system using temperature | — | 2010-02-16 |
| 7539328 | Surface position measuring method and apparatus | Yuji Kosugi | 2009-05-26 |