Issued Patents All Time
Showing 26–28 of 28 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6628392 | Light modulation apparatus and optical switch, movement detecting device and distance measuring device, alignment device and semiconductor aligner, and processes thereof | Ryo Kuroda, Yasuhiro Shimada, Junichi Seki, Yasuhisa Inao | 2003-09-30 |
| 6559926 | Pattern forming apparatus and pattern forming method | Ryo Kuroda | 2003-05-06 |
| 6408123 | NEAR-FIELD OPTICAL PROBE HAVING SURFACE PLASMON POLARITON WAVEGUIDE AND METHOD OF PREPARING THE SAME AS WELL AS MICROSCOPE, RECORDING/REGENERATION APPARATUS AND MICRO-FABRICATION APPARATUS USING THE SAME | Ryo Kuroda, Yasuhiro Shimada | 2002-06-18 |