Issued Patents All Time
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11156929 | Detection apparatus detection method and lithography apparatus | — | 2021-10-26 |
| 10659736 | Alignment apparatus, lithography apparatus, and article manufacturing method | — | 2020-05-19 |
| 10503079 | Position detection method, position detection apparatus, lithography apparatus, and article manufacturing method | — | 2019-12-10 |
| 10314142 | Apparatus and method for detecting position, exposure apparatus, and method for the same | — | 2019-06-04 |
| 10185876 | Detection apparatus, detection method, and lithography apparatus | — | 2019-01-22 |
| 9703214 | Lithography apparatus, lithography method, and article manufacturing method | — | 2017-07-11 |
| 9606461 | Measuring apparatus, measuring method, lithography apparatus, and method of manufacturing article | — | 2017-03-28 |
| 8405818 | Position detection apparatus, exposure apparatus, and device fabrication method | — | 2013-03-26 |