Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9423299 | Exposure apparatus, exposure method, and device manufacturing method | Kazuki Yamamoto | 2016-08-23 |
| 8094289 | Scanning exposure apparatus and device manufacturing method | — | 2012-01-10 |
| 7477356 | Exposure apparatus | — | 2009-01-13 |
| 7456934 | Exposure apparatus and device manufacturing method | — | 2008-11-25 |
| 7433020 | Apparatus having photoelectric converting element, and device manufacturing method | — | 2008-10-07 |
| 6882407 | Exposure apparatus | — | 2005-04-19 |