SY

Sumitada Yamamoto

Canon: 3 patents #11,241 of 19,416Top 60%
Overall (All Time): #1,592,595 of 4,157,543Top 40%
3
Patents All Time

Issued Patents All Time

Showing 1–3 of 3 patents

Patent #TitleCo-InventorsDate
7119952 Optical instrument, exposure apparatus, and device manufacturing method — 2006-10-10
7030960 Exposure apparatus and purging method for the same — 2006-04-18
6914667 Exposure apparatus and purging method for the same — 2005-07-05