Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7777864 | Device and method for controlling close contact of near-field exposure mask, and near-field exposure mask for the same | Yasuhisa Inao | 2010-08-17 |
| 7317197 | Method of detecting tightly adhering state, tight adhesion control method and method of and apparatus for near field exposure | Yasuhisa Inao, Toshihiro Fuse | 2008-01-08 |