Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6025115 | Processing method for etching a substrate | Toshiyuki Komatsu, Yasue Sato | 2000-02-15 |
| 5981001 | Processing method for selectively irradiating a surface in presence of a reactive gas to cause etching | Toshiyuki Komatsu, Yasue Sato | 1999-11-09 |
| 5962194 | Processing method and apparatus | Toshiyuki Komatsu, Yasue Sato | 1999-10-05 |
| 5863706 | Processing method for patterning a film | Toshiyuki Komatsu, Yasue Sato | 1999-01-26 |
| 5824455 | Processing method and apparatus | Toshiyuki Komatsu, Yasue Sato | 1998-10-20 |
| 5714306 | Processing method and apparatus | Toshiyuki Komatsu, Yasue Sato | 1998-02-03 |