Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10509335 | Cover member, conveying apparatus, lithography apparatus, and method of manufacturing article | Kazunori Nakajima | 2019-12-17 |
| 10185233 | Cover member, conveying apparatus, lithography apparatus, and method of manufacturing article | Kazunori Nakajima | 2019-01-22 |
| 9104108 | Holder, lithography apparatus, and method of manufacturing article | — | 2015-08-11 |
| 8766215 | Charged particle beam drawing apparatus and method of manufacturing article | — | 2014-07-01 |