Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8663430 | Magnetron sputtering apparatus and method for manufacturing thin film | — | 2014-03-04 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8663430 | Magnetron sputtering apparatus and method for manufacturing thin film | — | 2014-03-04 |