Issued Patents All Time
Showing 1–14 of 14 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7887189 | Projection type display apparatus which detects light emitted from a face of a beam splitter and method thereof | Junichi Iwai | 2011-02-15 |
| 6819493 | Illumination apparatus with light shielding near an exit plane of an optical pipe and projection exposure apparatus using same | — | 2004-11-16 |
| 6798577 | Illumination apparatus with light shielding near an exit plane of an optical pipe and projection exposure apparatus using same | — | 2004-09-28 |
| 6738129 | Illumination apparatus, exposure apparatus, and device fabricating method using the same | — | 2004-05-18 |
| 6614597 | Illumination apparatus and projection exposure apparatus | — | 2003-09-02 |
| 6259512 | Illumination system and exposure apparatus having the same | — | 2001-07-10 |
| 5991088 | Illumination system and exposure apparatus | — | 1999-11-23 |
| 5963305 | Illumination system and exposure apparatus | — | 1999-10-05 |
| 5946138 | Illumination optical system, exposure device and device manufacturing method | — | 1999-08-31 |
| 5940214 | Optical arrangement with diffractive optical element | Masayuki Suzuki | 1999-08-17 |
| 5926257 | Illumination optical system and exposure apparatus having the same | — | 1999-07-20 |
| 5905597 | Optical apparatus | Tsunefumi Tanaka | 1999-05-18 |
| 5790902 | Zoom lens | Masatake Kato, Masaharu Eguchi, Hideki Ogawa | 1998-08-04 |
| 5717413 | Control device for display device | — | 1998-02-10 |