Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9891525 | Exposure method, exposure apparatus, and article manufacturing method | — | 2018-02-13 |
| 9229312 | Exposure apparatus, measurement method, stabilization method, and device fabrication method | — | 2016-01-05 |
| 8625069 | Exposure apparatus and method of manufacturing device | Tadao Nakamura | 2014-01-07 |
| 8163467 | Dummy light-exposed substrate, method of manufacturing the same, immersion exposure apparatus, and device manufacturing method | Tsuyoshi Kitamura | 2012-04-24 |
| 7961295 | Exposure apparatus, measurement method, stabilization method, and device fabrication method | — | 2011-06-14 |