Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9382624 | Film formation method using oscillators for measurement and calibration during calibration step performed during film formation | Yoshiyuki Nakagawa, Shingo Nakano | 2016-07-05 |
| 9054147 | Alignment method, alignment apparatus, and organic electroluminescent (EL) element manufacturing apparatus | — | 2015-06-09 |
| 8398774 | Method of manufacturing organic light emitting device and vapor deposition system | Manabu Otsuka, Yuzo Tokunaga, Seiji Mashimo, Toshiaki Yoshikawa | 2013-03-19 |
| 8062425 | Vapor deposition system and vapor deposition method | Toshiaki Yoshikawa | 2011-11-22 |
| 7964037 | Deposition apparatus | Toshiaki Yoshikawa, Seiji Mashimo | 2011-06-21 |