Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11774850 | Method for disposing substrate and method for manufacturing article | — | 2023-10-03 |
| 10948829 | Pattern forming apparatus, alignment mark detection method, and pattern forming method | — | 2021-03-16 |
| 10501635 | Magnesium oxide powder, resin composition including same, and method for producing magnesium oxide powder | Naoto Nishida, Tatsuki Okutsu, Akira Yoshida | 2019-12-10 |
| 10431463 | Substrate holding device, lithography apparatus, and article production method | — | 2019-10-01 |
| 9740109 | Holding device, lithography apparatus, and method for manufacturing item | — | 2017-08-22 |