Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11586117 | Lamp, light source device, exposure apparatus, and article manufacturing method | Hiroyuki Tomita | 2023-02-21 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11586117 | Lamp, light source device, exposure apparatus, and article manufacturing method | Hiroyuki Tomita | 2023-02-21 |